JPS647250Y2 - - Google Patents

Info

Publication number
JPS647250Y2
JPS647250Y2 JP1982162963U JP16296382U JPS647250Y2 JP S647250 Y2 JPS647250 Y2 JP S647250Y2 JP 1982162963 U JP1982162963 U JP 1982162963U JP 16296382 U JP16296382 U JP 16296382U JP S647250 Y2 JPS647250 Y2 JP S647250Y2
Authority
JP
Japan
Prior art keywords
evacuation
mesh
high vacuum
sample chamber
exhaust port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982162963U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5967590U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16296382U priority Critical patent/JPS5967590U/ja
Publication of JPS5967590U publication Critical patent/JPS5967590U/ja
Application granted granted Critical
Publication of JPS647250Y2 publication Critical patent/JPS647250Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP16296382U 1982-10-27 1982-10-27 高真空排気装置 Granted JPS5967590U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16296382U JPS5967590U (ja) 1982-10-27 1982-10-27 高真空排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16296382U JPS5967590U (ja) 1982-10-27 1982-10-27 高真空排気装置

Publications (2)

Publication Number Publication Date
JPS5967590U JPS5967590U (ja) 1984-05-08
JPS647250Y2 true JPS647250Y2 (en]) 1989-02-27

Family

ID=30357708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16296382U Granted JPS5967590U (ja) 1982-10-27 1982-10-27 高真空排気装置

Country Status (1)

Country Link
JP (1) JPS5967590U (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5529269B2 (en]) * 1974-05-20 1980-08-02

Also Published As

Publication number Publication date
JPS5967590U (ja) 1984-05-08

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